inSEM HT System

Microprobe

The Nanomechanics InSEM HT provides 800°C isothermal heating of the InForce tip and sample for the InSEM in-situ mechanical properties microprobe. Independent control of the tip and sample temperatures is integrated with multi-location thermocouple feedback, active cooling, and of course the precision and dynamic range of the mechanical test system itself.


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inSEM Microprobe

The InSEM is a tool for characterizing the mechanical properties of surfaces or structures, which is designed to function with sub-nanometer resolution in an in-situ vaccum environment such as an SEM or FIB.

The InSEM is designed to be modular and flexible, to enable a wide range of application. Port availability on SEM/FIB chambers is often an issue. We've designed the InSEM to mount to a variety of ports, or to be mounted directly on the SEM stage. As different applications call for different system configurations, the InSEM can easily be moced from one port to another or assembled into the on-stage configuration. 

Flexibility
The InSEM is designed to be modular and flexible, to enable a wide range of applications. Port availability on SEM/FIB chambers is often an issue. We've designed the InSEM to mount to a variety of ports, or to be mounted directly on the SEM stage. As different applications call for different system configurations, the InSEM can easily be moved from one port to another or assembled into the on-stage configuration.

Nanomechanics, Inc. provides a variety of tools for use in mechanical properties testing for the SEM/FIB or vacuum environment. All of our devices and software are designed to be modular, easy-to-use and high-performance. Many of the testing and characterization techniques are based on the highly cited paper, W.C. Oliver and G.M. Pharm's "An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments," J. Mater Res., Vol. 7, No. 6, pp. 15-64-1583 (June 1992), which forms the basis for nanoindentation measurements of hardness and modulus. However, the InSEM has great capabilities and is being used for compression and tensile testing more common to traditional tensile testers and DMA testers. All testing techniques offer the ability to watch the deformation as it happens.

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